Optical coating system with two electron guns and ion assist

The system includes three high-vacuum furnace chambers with different temperature ranges.

The first subsystem consists of a furnace chamber for temperatures up to 1300°C and a further recipient for small batches with temperatures up to 2500°C. A common pump system with diffusion pump generates the vacuum.

The second subsystem consists of an identical furnace chamber for temperatures up to 1300°C. An oil-free pump system allows soldering for components that are more sensitive to purity.

The entire system is powered by a single electrical cabinet and controlled by ATLAS. The system can be separated for transport in a few easy steps.

Requirements