Project Description

Control retrofit – integration of plasma source and new E-Gun – process development

A BAK640 system is upgraded with the new ATLAS system control. In addition to the control retrofit, a new E-Gun from Beamtec, a new RF plasma source from CCR and new quartz heaters are integrated. The rate measurement is also replaced and a shielding set, adapted to the new components, is created.

After commissioning, the system is set into operation and the process – coating of optical components – is applied and optimized.

Requirements

  • Chamber and components were brought in by the customer

Modifications

  • Design and construction of the system

  • Design and integration of prototype ion source (ionitron)

  • System control by ATLAS

  • Commissioning