Project Description

Complete retrofit – with new electric cabinet and new system control

Several systems of type BAS450, a DC plasma sputtering system for metallic coating, are completely overhauled. The old system is dismantled and the recipient is reconditioned. The new system will consist of new and revised components.

A new electrical cabinet, new safety technology and a new system control enable the automated continuous operation of the system.

Requirements

  • Chamber and components were brought in by the customer

Modifications

  • Recipient inspection – sealing surfaces reworked and surfaces electropolished

  • New magnetron designed and manufactured

  • Replacement of all drives

  • Integration quartz radiant heater

  • New design of cover and base plate

  • Integration RF-BIAS

  • Renewal of cooling water system

  • Pump system replaced

  • Planning and realisation of electrification and automation